Tommy:

I think Kenton means the alpha step machines. I remember that your machine dumps a poorly formatted 5-column text file and ours dumps a .pro extension. The software is called Alpha-Step IQ and we're running v3.0.0. I'm not sure if there's been updates since, but that computer is offline....the help file still has a copyright from 2009. KLA-Tencor makes the machine, so I presume that they have a hand in the software as well.